제품 소개
MRC-700 Series
Analog & Digital Mass Flow Controller, Mass Flow Meter
제품 설명
- Analog & Digital MFC, MFM
- Low Pressure Control (0.12 bar~)
- Fast Response (≤ 1.0 sec)
- High-Accuracy (±1.0% F.S.)
- Analog, Digital, Device Net, Ether CAT Communication
Specification
상세 스펙
| MODEL | MRC-700 | MRC-701 | MRC-702 | MRC-703 | MRC-704 | |
|---|---|---|---|---|---|---|
| Flow Range | 30SLM | 100SLM | 200SLM | 300SLM | 400SLM | |
| Flow Control Range | 2 ~ 100% | |||||
| Operating Inlet Pressure | Normal : 2 ~ 5 bar ※[CH4] 0.15 ~ 3.0 bar (Normal 0.12 bar) |
|||||
| Operation Inlet Pressure | Accuracy | ±2.0% F.S. (10% ≤ 설정유량) (Normal ±1.0% F.S.) | ||||
| Linearity | ±0.5% F.S. (10~100%) | |||||
| Repeatability | ±0.5% F.S. (10~100%) | |||||
| Response | Setting time | ≤ 2.0 sec (Normal ≤ 1.0sec) | ||||
| Close time | ≤ 2.0 sec | |||||
| ZERO SHIFT | ＜ ±0.5 % F.S. / year | |||||
| Temperature Sensitivity (15 ~ 30℃) |
＜ ±0.03 % F.S. / ℃ (Normal ±0.01% F.S. / ℃ ) | |||||
| Temperature (Guarantee) | 5 ~ 50 %(15 ~ 35 %) | |||||
| Fittings | LOK, VCR | |||||
| Valve Type | Normally Closed / Solenoid Type | |||||
| Leak | Internal | ≤ 1.0 % F.S. | ||||
| External | 0.0000000001 atm cc / sec (He) | |||||
| Protocol | 0 to 5VDC, 4~20 mA, RS485 | |||||
Dimension
단면도
| MODEL | MRC-700 | MRC-701/702 | MRC-703/704 | |
|---|---|---|---|---|
| A | 1/4"LOK | (127.4) | (146.3) | (196.6) |
| 3/8"LOK | (130.4) | (149.3) | (199.9) | |
| 1/2"LOK | - | (154.9) | (205.5) | |
| 3/4"LOK | - | - | (209.8) | |
| 1/4"VCR | 123.8 | 141.3 | - | |
| 1/2"VCR | 131.4 | 148.9 | 200.0 | |
| B | 76 | 93.5 | 141 | |
| C | 137.8 | 129.8 | 150 | |
| D | 12.7 | 17 | 24.5 | |
| E | 31 | 36 | 49 | |
| F | 14 | 23 | 14.5 | |
| G | 48 | 48 | 54 | |
| H | 20 | 0 | 24 | |